Scope

         THE SCOPE AND TOPICS OF THE CONFERENCE

 

      This conference will cover the following aspects:

  • ALD Precursors and Precursor Design
  • Simulation, Modeling, and Theory of ALD Growth
  • Surface Chemistry/Preparation for ALD
  • Patterned and Selective Area ALD
  • In-situ Monitoring and Analysis during ALD Growth
  • Plasma and Other Energy-Enhanced ALD Methods
  • Applications of ALD for Microelectronics
  • Energy Storage Applications of ALD
  • Applications of ALD for Photovoltaics
  • ALD Applications in Optics and Display
  • ALD for Flexible and Organic Electronics
  • ALD for Catalysis
  • ALD for Medical and Biological Applications
  • ALE Technology

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