Scope

         THE SCOPE AND TOPICS OF THE CONFERENCE

 

This conference will cover the following aspects:

  • 1.ALD Precursors and Precursor Design
  • 2.Simulation, Modeling, and Theory of ALD Growth
  • 3.Surface Chemistry/Preparation for ALD
  • 4.Patterned and Selective Area ALD
  • 5.In-situ Monitoring and Analysis during ALD Growth
  • 6.Plasma and Other Energy-Enhanced ALD Methods
  • 7.Applications of ALD for Microelectronics
  • 8.Energy Storage Applications of ALD
  • 9.ALD for MEMS and Sensors
  • 10.Applications of ALD for Photovoltaics
  • 11.ALD Applications in Optics and Display
  • 12.ALD for Flexible and Organic Electronics
  • 13.ALD for Catalysis
  • 14.ALD for Medical and Biological Applications
  • 15.ALE Technology

© Fudan University & Soochow University

Powered by : WeiCheng